Generative Models for Optical Surface Inspection: Synthetic Training Data Augmentation via Conditional GANs and Diffusion Models
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Keywords

Synthetic data generation
Generative adversarial networks
Diffusion models
Data augmentation
Optical inspection
Defect synthesis

Abstract

Training high-performance deep learning models for optical surface inspection requires large labeled datasets that are difficult and expensive to acquire in real manufacturing environments. Labeled defect examples are particularly scarce because defects are inherently rare events—a well-functioning production line produces defect rates below 5%, meaning that even large inspection datasets contain disproportionately few defect samples for training. This study proposes a generative augmentation framework for optical surface inspection that uses conditional generative adversarial networks (cGANs) and diffusion models to synthesize realistic labeled training data for optical measurement images, enabling data-hungry deep learning models to be trained effectively even when real labeled samples are scarce. Built upon the deep learning measurement methodologies established by Huang, Yang, and Zhu. (2023) in 4D thermal imaging and the optical metrology innovations of Huang, Tang, Liu, and Huang (2026), the framework generates synthetic thermal images, phase maps, and defect visualizations with perfect ground truth labels at arbitrary quantities, conditioned on physical defect parameters such as scratch length, pit diameter, and coating delamination area. Comprehensive experiments demonstrate that augmenting training datasets with generated synthetic samples improves defect detection mIoU by 14.7 percentage points (from 67.3% to 82.0%) in the low-data regime with only 500 real labeled samples, achieves near-saturation performance with 2,000 generated samples per defect class, and produces synthetic thermal images that are indistinguishable from real thermal data by both human inspectors (92.1% agreement) and automated statistical tests (Frechet Inception Distance = 8.4). The framework provides a practical solution to the labeled data bottleneck in precision optical manufacturing quality control.

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